Electron heating mechanisms in dual-frequency capacitive discharges
نویسندگان
چکیده
منابع مشابه
Electron heating mode transitions in dual frequency capacitive discharges
We consider electron heating in the sheath regions of capacitive discharges excited by a combination of two frequencies, one much higher than the other. There is a common supposition that in such discharges the higher frequency is the dominant source of electron heating. In this letter, we discuss closed analytic expressions quantifying the Ohmic and collisionless electron heating in a dual fre...
متن کاملCollisionless heating in capacitive discharges enhanced by dual-frequency excitation.
We discuss collisionless electron heating in capacitive discharges excited by a combination of two disparate frequencies. By developing an analytical model, we find, contrary to expectation, that the net heating in this case is much larger than the sum of the effects occurring when the two frequencies act separately. This prediction is substantiated by kinetic simulations, which are also in exc...
متن کاملPenning-dominated capacitive discharges
Atmospheric pressure radio-frequency (rf) capacitive micro-discharges are of interest due to emerging applications, especially in the bio-medical field. A previous global model did not consider high-power phenomena such as sheath multiplication, thus limiting its applicability to the lower power range. To overcome this, we use one-dimensional particle-in-cell (PIC) simulations of atmospheric He...
متن کاملNarrow gap electronegative capacitive discharges
Narrow gap electronegative (EN) capacitive discharges are widely used in industry and have unique features not found in conventional discharges. In this paper, plasma parameters are determined over a range of decreasing gap length L from values for which an electropositive (EP) edge exists (2-region case) to smaller L-values for which the EN region connects directly to the sheath (1-region case...
متن کاملKinetics Mechanisms of High Electron Density Argon-Water Plasma Discharges
The plasma kinetics in He-H2O mixtures in diffuse atmospheric pressure glow discharges have been developed and partially validated [1]. However, the plasma kinetics in filamentary water-containing discharges, although ubiquitous for many applications, have not been studied in detail. A major difference between diffuse and filamentary plasmas is that the higher electron and ion density results i...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2007
ISSN: 0963-0252,1361-6595
DOI: 10.1088/0963-0252/16/2/020